Details

MEMS Vibratory Gyroscopes


MEMS Vibratory Gyroscopes

Structural Approaches to Improve Robustness
MEMS Reference Shelf

von: Cenk Acar, Andrei Shkel

149,79 €

Verlag: Springer
Format: PDF
Veröffentl.: 16.12.2008
ISBN/EAN: 9780387095363
Sprache: englisch
Anzahl Seiten: 260

Dieses eBook enthält ein Wasserzeichen.

Beschreibungen

MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In the first part, the dynamics of the vibratory gyroscope sensing element is developed, common micro-fabrication processes and methods commonly used in inertial sensor production are summarized, design of mechanical structures for both linear and torsional gyroscopes are presented, and electrical actuation and detection methods are discussed along with details on experimental characterization of MEMS gyroscopes. In the second part, design concepts that improve robustness of the micromachined sensing element are introduced, supported by constructive computational examples and experimental results illustrating the material.

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